Comsol multiphysics application for estimating ozone concentration in a chamber with plane electrodes.

Abstract

Various studies and research have been carried out on the generation of ozone plasma using the Dielectric Barrier Discharge (DBD) Method with non-thermal plasma conditions. DBD Method has various advantages such as the uniform distribution of the electric field on the dielectric barrier to producing plasma. In this study, COMSOL Multiphysics application was used to carry out ozone plasma examination from the Ozone Chamber – which is composed of a perforated aluminium plate electrode with a perforated configuration separated by a single glass dielectric. COMSOL Multiphysics software has a Plasma Module that includes electrostatic parameters, drift-diffusion, and heavy species transport to produce discharge on pure O2 with an output of plasma ozone concentration. From the results of this simulation analysis, the highest obtained ozone concentration was 3710.476 ppm at the applied voltage of 8.0 kV and for the lowest concentration was 3682.598 ppm at 5.0 kV applied voltage. It shows that the applied voltage to the electrode has a linear correlation with the generated ozone concentration.