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Nitrogen oxide gas sensor based on metal oxide thin film

Mubin, M. Helmi and Chaudhary, Kashif Tufail and Haider, Zuhaib and Dabagh, Shadab and Aziz, M. Safwan and Ali, Jalil (2018) Nitrogen oxide gas sensor based on metal oxide thin film. Journal of Computational and Theoretical Nanoscience, 15 (3). pp. 1059-1063. ISSN 1546-1955

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Official URL: http://dx.doi.org/10.1166/jctn.2018.7202


Indium tin oxide (ITO) thin films of different thicknesses are grown on the corning glass substrates using radio frequency (RF) magnetron sputtering. The variation in resistance of deposited thin films relative to nitrogen oxide (NO2) at different operating temperatures is measured. The sensitivity of grown thin films as NO2 sensor is investigated in single layer and sensory array configurations. The high sensitivity is observed for thin film with thickness 227 nm is 1.440 as single layer configuration and 2.065 as series array combination of thin films with thickness 132 nm +424 nm. The response time, reproducibility and recovery time are determined relative to NO2 gas sensing behavior of the fabricated film. The response and recovery times determined for single layer configuration are 108 and 240 seconds respectively whereas for array configuration are 60 and 600 seconds respectively. A very stable reproducibility response towards NO2 gas sensing is observed.

Item Type:Article
Uncontrolled Keywords:gas sensor, ITO
Subjects:Q Science > QC Physics
ID Code:85762
Deposited By: Widya Wahid
Deposited On:28 Jul 2020 02:45
Last Modified:28 Jul 2020 02:45

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