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Investigating optical properties of ITO thin film grown by RF sputtering

Abd. Mubin, M. Helmi and Wan Shamsuri, W. N. and Ismail, Khamim and Abd. Aziz, M. S. and Haider, Zuhaib and Tufail, Kashif and Ali, Jalil (2017) Investigating optical properties of ITO thin film grown by RF sputtering. Buletin Optik, 2 (1). pp. 25-33. ISSN 2504-8546


Official URL: http://laser.utm.my/buletinoptik/files/2017/03/201...


Indium tin oxide (ITO) thin films of different thickness were successfully grown on the corning glass substrate using radio frequency magnetron sputtering technique. All the sample were undergone heat treatment at temperature of 600 ºC for 4 hours inside a furnace. The measurement of the thickness have been performed using surface profiler and optical properties have been studied using UV-VIS spectroscopy in wavelength regime 200-2500 nm for determination of energy band gap. Energy band gap was calculated based on the optical transmittance and photon energy and being measured in range of 2.76 eV – 3.54 eV while the transmittance was approximately 90 %.

Item Type:Article
Uncontrolled Keywords:ITO, RF Sputtering, Transmittance, Energy Band Gap
Subjects:Q Science > QC Physics
ID Code:80722
Deposited By: Fazli Masari
Deposited On:27 Jun 2019 06:20
Last Modified:27 Jun 2019 06:20

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