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Effects of compensating the temperature coefficient of frequency with the acoustic reflector layers on the overall performance of solidly mounted resonators

Munir, J. and Mirea, T. and DeMiguel Ramos, M. and Saeed, M. A. and Shaari, A. and Iborra, E. (2017) Effects of compensating the temperature coefficient of frequency with the acoustic reflector layers on the overall performance of solidly mounted resonators. Ultrasonics, 74 . pp. 153-160. ISSN 0041-624X

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Abstract

Thin film acoustic wave resonator based devices require compensation of temperature coefficient of frequency (TCF) in many applications. This work presents the design and fabrication of temperature compensated solidly mounted resonators (SMRs). The characteristics of each material of the layered structure have an effect on the device TCF but depending on the relative position with respect to the piezoelectric material in the stack. The influence of material properties of the different layers composing the device on the TCF is discussed in detail. TCF behavior simulation is done with Mason's model and, to take into account the deterioration of overall performance due to the finite lateral size and shape of the resonator, we have used 2D and 3D finite element modelling of the resonators. The overall behavior of the device for external loads is predicted. SMRs are designed according to simulations and fabricated with different configurations to obtain TCF as near to zero as possible with an optimized response. Resonators are made by depositing Mo/AlN/Mo piezoelectric stacks on acoustic reflectors. As reflector materials, conductive W and insulating WOx films have been used as high acoustic impedance materials. SiO2 films are used as low acoustic impedance material.

Item Type:Article
Uncontrolled Keywords:Acoustic reflectors, Finite Element Analysis, Solidly mounted resonators, Temperature coefficient of frequency
Subjects:Q Science > QC Physics
Divisions:Science
ID Code:75552
Deposited By: Widya Wahid
Deposited On:15 Apr 2018 16:04
Last Modified:15 Apr 2018 16:04

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