Thermal analysis of wirelessly powered thermo-pneumatic micropump based on planar LC circuit

Abstract

This paper studies the thermal behavior of a wireless powered micropump operated using thermo-pneumatic actuation. Numerical analysis was performed to investigate the temporal conduction of the planar inductor-capacitor (LC) wireless heater and the heating chamber. The result shows that the temperature at the heating chamber reaches steady state temperature of 46.7°C within 40 seconds. The finding was further verified with experimental works through the fabrication of the planar LC heater (RF sensitive actuator) and micropump device using MEMS fabrication technique. The fabricated device delivers a minimum volume of 0.096 μL at the temperature of 29°C after being thermally activated for 10 s. The volume dispensed from the micropump device can precisely controlled by an increase of the electrical heating power within the cut-off input power of 0.22 W. Beyond the power, the heat transfer to the heating chamber exhibits non-linear behavior. In addition, wireless operation of the fabricated device shows successful release of color dye when the micropump is immersed in DI-water containing dish and excited by tuning the RF power.