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Undoped diamond-like carbon thin films grown by direct current-plasma enhanced chemical vapour deposition: structural and electrical properties

Keng Yik, Jackie Chen and Deraman, Karim and Ong, Wai Kit and Wan Shamsuri, Wan Nurulhuda and Hussin, Rosli (2013) Undoped diamond-like carbon thin films grown by direct current-plasma enhanced chemical vapour deposition: structural and electrical properties. In: 1st International Conference on Science and Engineering of Materials, ICoSEM 2013, 13-14 Nov, 2013, Kuala Lumpur, Malaysia.

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Official URL: http://dx.doi.org/10.4028/www.scientific.net/AMR.9...

Abstract

Undoped diamond - like carbon thin films have been grown by DC - PECVD system. The synthesis of the DLC films was carried out in the presence of gas of (CH4 + H2 + Ar) in a custom - made reactor. The substrate temperature was initiated from the range of 300 °C to 600 °C under an optimum pressurized medium. The AFM image reveals that the optimization of DLC films growth at the substrate temperature 400 °C has a significant surface roughness and average grain size which is compatible to the result of film thickness measurement. The sample J400 shows an excellent nonlinear rectifying diode-like characteristic across the small potential difference.

Item Type:Conference or Workshop Item (Paper)
Uncontrolled Keywords:surface roughness, chemical vapour deposition
Subjects:Q Science > Q Science (General)
Divisions:Science
ID Code:67125
Deposited By: Siti Nor Hashidah Zakaria
Deposited On:15 Jun 2017 10:50
Last Modified:15 Jun 2017 10:50

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