Keng Yik, Jackie Chen and Deraman, Karim and Ong, Wai Kit and Wan Shamsuri, Wan Nurulhuda and Hussin, Rosli (2013) Undoped diamond-like carbon thin films grown by direct current-plasma enhanced chemical vapour deposition: structural and electrical properties. In: 1st International Conference on Science and Engineering of Materials, ICoSEM 2013, 13-14 Nov, 2013, Kuala Lumpur, Malaysia.
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Official URL: http://dx.doi.org/10.4028/www.scientific.net/AMR.9...
Abstract
Undoped diamond - like carbon thin films have been grown by DC - PECVD system. The synthesis of the DLC films was carried out in the presence of gas of (CH4 + H2 + Ar) in a custom - made reactor. The substrate temperature was initiated from the range of 300 °C to 600 °C under an optimum pressurized medium. The AFM image reveals that the optimization of DLC films growth at the substrate temperature 400 °C has a significant surface roughness and average grain size which is compatible to the result of film thickness measurement. The sample J400 shows an excellent nonlinear rectifying diode-like characteristic across the small potential difference.
| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Uncontrolled Keywords: | surface roughness, chemical vapour deposition |
| Subjects: | Q Science > Q Science (General) |
| Divisions: | Science |
| ID Code: | 67125 |
| Deposited By: | Siti Nor Hashidah Zakaria |
| Deposited On: | 15 Jun 2017 02:50 |
| Last Modified: | 15 Jun 2017 02:50 |
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