Thickness dependency on dielectric property of lead titanate thin film

Abstract

Previous studies have shown that lead titanate (PbTiO3) with its full potential brings out the ferroelectric property provided by its perovskite structure. It was predicted that from origination to become a modified lead titanate is most preferable, i.e. lead zirconium titanate (PZT). In the present study, PbTiO3 thin films were made through a simple sol-gel method by using spin coating technique. The deposition of thin films was at constant rate, 100rpm/s and took about 25s to complete. The fabricated thin films were then annealed at different temperature. After that, the films thickness measurement was taken by surface profiler (KLA Tencor) and characterization on dielectric property comprised at different anneal temperature. This feature indicates the power loss that will be taken into account under ac condition. The measurement of thin films was executed at 1Hz to 1MHz by using impedance spectroscopy analyzer (Solartron S1 1260A-1296) and electrical part was measured by solar simulator (BUKOH KEIKI EP-2000).