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The effects of annealing temperatures on composition and strain in SixGe(1-x) obtained by melting growth of electrodeposited Ge on Si (100)

Zainal Abidin, Mastura Shafinaz and Morshed, Tahsin and Chikita, Hironori and Kinoshita, Yuki and Muta, Shunpei and Anisuzzaman, Mohammad and Park, Jong-Hyeok and Matsumura, Ryo and Mahmood, Mohamad Rusop and Sadoh, Taizoh and Hashim, Abdul Manaf (2014) The effects of annealing temperatures on composition and strain in SixGe(1-x) obtained by melting growth of electrodeposited Ge on Si (100). Materials, 7 (2). pp. 1409-1421. ISSN 1996-1944

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Official URL: http://dx.doi.org/10.3390/ma7021409

Abstract

The effects of annealing temperatures on composition and strain in SixGe1-x, obtained by rapid melting growth of electrodeposited Ge on Si (100) substrate were investigated. Here, a rapid melting process was performed at temperatures of 1000, 1050 and 1100 degrees C for 1 s. All annealed samples show single crystalline structure in (100) orientation. A significant appearance of Si-Ge vibration mode peak at similar to 400 cm(-1) confirms the existence of Si-Ge intermixing due to out-diffusion of Si into Ge region. On a rapid melting process, Ge melts and reaches the thermal equilibrium in short time. Si at Ge/Si interface begins to dissolve once in contact with the molten Ge to produce Si-Ge intermixing.

Item Type:Article
Uncontrolled Keywords:silicon, rapid melting
Subjects:T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions:Electrical Engineering
ID Code:62904
Deposited By: Fazli Masari
Deposited On:11 Jul 2017 07:25
Last Modified:11 Jul 2017 07:25

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