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Ghadim, Mohammad Abbasgholipour and Mailah, Musa and Alasti, Behzad Mohammadi and Ghadim, Mehdi Abbasgholipour (2014) Simulation of MEMS capacitive thermal sensor based on tip deflection of a functionally graded micro-beam. Advanced Materials Research, 845 . pp. 340-344. ISSN 1022-6680

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