Universiti Teknologi Malaysia Institutional Repository

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Zainal Ariffin, Nur Hamizah and Yahaya, Hafizal and Shinano, Shunji and Tanaka, Satoru and Hashim, Abdul Manaf (2015) Fabrication of conical micropore structure on silicon nitride/silicon using focused ion beam milling for biosensor application. Microelectronic Engineering, 133 . pp. 1-5. ISSN 0167-9317

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