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Piezoresistive strain sensing using carbon nanotube forests suspended by Parylene-C membranes

Mohamed Ali, Mohamed Sultan and Bsoul, Anas and Nojeh, Alireza and Takahata, Kenichi (2012) Piezoresistive strain sensing using carbon nanotube forests suspended by Parylene-C membranes. Applied Physics Letters, 100 (21). pp. 1-3. ISSN 0003-6951

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Official URL: https://aip.scitation.org/doi/10.1063/1.4721460

Abstract

We present a strain gauge that uses a carbon nanotube (CNT) forest, partially embedded in a Parylene-C membrane, as a piezoresistor. The device exhibits high sensitivity with a gauge factor of 4.52 or higher for strains up to ~1.5, offering much higher sensitivity in the strain range than those reported for other types of CNT-forest/polymer composite piezoresistors. The gauge also shows a linear response to bending strains generated by forces applied perpendicularly to the membrane with a 55-ppm/mN sensitivity. These findings suggest promising characteristics for a variety of sensing applications of the CNT-forest/Parylene film.

Item Type:Article
Uncontrolled Keywords:carbon nanotube (CNT), Parylene-C membrane
Subjects:T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions:Electrical Engineering
ID Code:32986
Deposited By: Fazli Masari
Deposited On:31 Jul 2013 05:37
Last Modified:31 Oct 2018 12:36

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