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Effect of cathodic arc PVD parameters on roughness of TiN coating on steel substrate

Ali, M. and Hamzah, E. and Qazi, I. A. and Toff, M. R. M. (2010) Effect of cathodic arc PVD parameters on roughness of TiN coating on steel substrate. Current Applied Physics, 10 (2). 471 - 474.

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Official URL: http://dx.doi.org/10.1016/j.cap.2009.07.007


Titanium nitride which is widely used as a hard coating material was coated on tool steel, by physical vapor deposition method. Surface roughness was investigated as a function of deposition rate, substrate bias and temperature, nitrogen flow rate and metal ion etching. The study showed that increase in surface roughness mainly depends on the condition of sample preparation, surface treatment, macro-droplets, pitting defects, rise in compressive stress at higher coating thickness, growth defects and to a lesser extent selection of surface under testing. It was observed that chromium ion etching significantly reduced the surface roughness compared to titanium ion etching.

Item Type:Article
Uncontrolled Keywords:surface roughness, process parameters, macro-droplets
Subjects:T Technology > TJ Mechanical engineering and machinery
Divisions:Mechanical Engineering
ID Code:25117
Deposited By: Narimah Nawil
Deposited On:15 Feb 2017 08:16
Last Modified:22 Mar 2018 18:37

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