Ismail, Razali and Saad, Ismail and Arora, Vijay (2007) Investigation on the effects of halo implants for nanoscale vertical MOSFET. In: The 23rd Regional Conferences Solid State Science and Technology 2007 (RCSSST 2007), 2007, Johor Bahru.
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Abstract
To provide a platform for discussions of Solid State Science and Technology in all aspects of physical properties, chemistry, characterizations, preparation methods, optical properties, macro-,micro- and nano-structures. Besides that, modeling, simulation, measurement techniques as well as current development in technology will also be discussed.
Item Type: | Conference or Workshop Item (Paper) |
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Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering |
Divisions: | Electrical Engineering |
ID Code: | 24428 |
Deposited By: | INVALID USER |
Deposited On: | 18 Apr 2012 05:41 |
Last Modified: | 03 Aug 2017 00:04 |
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