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UV-Vis characterization of diamond-like carbon thin films deposited using (DC-PECVD)

Ab. Rahman, Nur Alifah (2010) UV-Vis characterization of diamond-like carbon thin films deposited using (DC-PECVD). Masters thesis, Universiti Teknologi Malaysia, Faculty of Science.



A study of optical properties of Diamond-like Carbon Thin Films deposited by DC-PECVD. The films was deposited on the corning with the ratio of Hydrogen, H2 (97%) and Methane, CH4 (3%). The temperatures were varied between 200°C to 600°C while maintaining other important variables such as DC voltage (1.5kV) and pressure (1 x 10-1 torr). From the light transmission using UV-Vis spectroscopy it was found that the type of optical transition is allowed indirect transition in the range of 3.8eV to 4.3eV. The ellipsometry is to determine the thickness, d. The thickness decreases with the increase of substrate deposition temperature. Photoluminescence properties were studied using photoluminescence spectrometer. The photoluminescence analysis was order to obtain the peak of excitation and emission range of the sample films. It has been found that the transition energy in the range of (3.06-3.22)eV.

Item Type:Thesis (Masters)
Additional Information:Supervisor : Assoc. Prof. Dr. Bakar Ismail; Thesis (Sarjana Sains (Fizik)) - Universiti Teknologi Malaysia 2010
Uncontrolled Keywords:thin films, optical properties
Subjects:Q Science > QC Physics
ID Code:16745
Deposited By: Zalinda Shuratman
Deposited On:02 Feb 2012 03:44
Last Modified:20 Sep 2017 03:40

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