Mohammad, Adib and Mohamed Sultan, Suhana and Tan, Michael Loong Peng (2022) Design and simulation of 2D zinc oxide based saw gas sensor for hydrogen gas sensing. In: 2022 IEEE International Conference on Semiconductor Electronics, ICSE 2022, 15 - 17 August 2022, Virtual, Kuala Lumpur.
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Official URL: http://dx.doi.org/10.1109/ICSE56004.2022.9863098
Abstract
The purpose of this research is to design a 2D ZnO - LiNbO3 layer structured surface acoustic wave (SAW) - based sensor for sensing hydrogen gas using Finite Element Method (FEM) in COMSOL Multiphysics software. The study also focuses on the effect of thickness of Zinc Oxide sensing layer in the detection and sensitivity of hydrogen gas present. The result shows that as thickness of the intermediate layer (ZnO) is varied from 0.4 µm to 2.0 µm the frequency shift increases and the total displacement varies having the highest displacement at 0.8 µm. This suggests that with the geometry of device used 0.8 µm is the optimal thickness of the ZnO intermediate layer for best performance in sensing hydrogen gas in the atmosphere.
| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Uncontrolled Keywords: | FEM, Hydrogen Gas, MEMS, SAW device, ZnO-LiNbO3 |
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering |
| Divisions: | Electrical Engineering |
| ID Code: | 98867 |
| Deposited By: | Widya Wahid |
| Deposited On: | 02 Feb 2023 09:56 |
| Last Modified: | 02 Feb 2023 09:56 |
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