Temperature sensitivity of FBG coating with zinc oxide and silicon carbide

Abstract

This work aims to evaluate the sensitivity of coated FBG in measuring non-thermal plasma temperature inside a dielectric barrier discharge reactor. The FBG sensor were coated with Zinc Oxide (ZnO) and Silicon Carbide (SiC) by using magnetron sputtering technique. Both materials are insulator hence suitable to probe temperature inside the plasma reactor. Results revealed that the temperature sensitivity of and SiC coated FBG were 12.6 pm/ C and 12.37 pm/ C, respectively (suggested to put both 2 decimal places). This means temperature sensitivity of ZnO is higher than bare FBG (12.43 pm/ C) while SiC coated FBG shows the lowest. The values show slightly different between each other and give less significant in sensitivity value. When applied it inside plasma, spectroscopic diagnostic result shows stable plasma throughout the time.