MEMS gas sensors: a review

Abstract

Micro-electromechanical system (MEMS) gas sensors represent a system that is capable of detecting the existence and concentration of gasses in the atmosphere. These sensors have become incredibly popular and have been widely used in a variety of fields, including the biomedical field. Over the years, several gas sensors have been developed to detect and analyze a wide range of gases. As sensor applications are expected to be further extended in the near future, it is, therefore, essential to review crucial types of gas sensors, their features, challenges, and a range of important applications. This paper presents a comprehensive review of the state-of-the-art gas sensors, which have been developed for gas sensing applications using MEMS technology. The working principle, the structure, the sensitive material and the important characteristics of each of these sensors are discussed. The focus of this review is on applications surrounding the use of electrochemical, optical and acoustic gas sensors for biomedical applications.