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Effect of substrate temperature on the properties of diamond-like carbon deposited by PECVD in methane atmosphere

Sarmid, Suriany and Oeraman, Karim and Ismail, Bakar and Sakrani, Samsudi (2006) Effect of substrate temperature on the properties of diamond-like carbon deposited by PECVD in methane atmosphere. In: Proceedings of Annual Fundamental Science Seminar 2006 (AFSS 2006), 6th - 7th June 2006, Universiti Teknologi Malaysia, Skudai, Malaysia.

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Abstract

Diamond-like carbon thin films were prepared at different substrate temperatures by using DC-PECVD at 1x10·1 Torr in methane atmosphere. The DC·PECVD system was reconstructed for gelling higher substrate temperature up to 560°C. Raman spectroscopy has been used to study the effect of chemical bonding of the films and the deposition rate is studied too. The deposition rate is decreased with the increasing substrate temperature. The Raman main band is due to the lattice vibration of Sp2 bonded carbon atoms (graphite band or G band). If the size of the graphite domains decrease, a low frequencies modulation corresponding to the disorder zone of graphite that corresponding to D peak. The Sp3 bonded carbon increased as the substrate temperature increase from 27°C to 200°C. The result also showed thatlcllG ratio decreased with increasing amount of Sp3 fraction as the temperature is increased up to 200°C.

Item Type:Conference or Workshop Item (Paper)
Uncontrolled Keywords:diamond-like carbon, DC-PECVD, temperature
Subjects:Q Science > QC Physics
Divisions:Science
ID Code:9303
Deposited By: Ms Zalinda Shuratman
Deposited On:07 Sep 2009 07:27
Last Modified:11 Nov 2010 07:22

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