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Investigation on the effects of oblique rotating ion implementation (ORI) for nanoscale vertical double gate NMOSFET

Saad, Ismail and Ismail, Razali and Arora, Vijay Kumar (2007) Investigation on the effects of oblique rotating ion implementation (ORI) for nanoscale vertical double gate NMOSFET. Journal of solid state science and technology letters, 14 (2). ISSN 0128-8393

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Item Type:Article
Subjects:T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions:Electrical Engineering
ID Code:8068
Deposited By: Norshiela Buyamin
Deposited On:25 Mar 2009 07:07
Last Modified:03 Apr 2009 07:12

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