FEM simulation on MEMS FP OTF using Al metallic mirror

Abstract

MEMS Fabry Perot Optical Tunable Filter (FP OTF) is widely used in WDM application. Most of this device is developed using DBR mirror in order to achieve high reflectivity. However, the usage of this mirror will increase the cost and complexity of MEMS FP OTF fabrication. Some application requires minimal bandwidth where it needs only 95% mirror reflectivity. This can be achieved using metallic mirror. The usage of metallic mirror reduces the complexity of MEMS FP OTF fabrication process. Therefore, FEM simulation model for MEMS FP OTF using Al metallic mirror is developed using CoventorWare 2006 software in order to investigate the performance in terms of optical Intensity and output spectrum within 1200nm to 1600nm wavelength range. Thickness of Al thin film is varied from 100nm to 1000nm to investigate the absorbance, A for a slice of metallic thin film mirror without substrate. MEMS FP OTF using LAI;=200nm and LAI;=500nm Al thin film are developed and simulated using Coventor Ware2006 software. Results are analyzed in terms of transmittivity, Free spectral Range (FSR) and Bandwidth (FWHM).