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The effect of thickness on ZnO thin film CO gas sensor

Ismail, Yazid Abdul Manakar and Md. Yusuf, Mohd. Nor and Wan Shamsuri, Wan Nurulhuda and Wahab, Yusof and Othaman, Zulkafli (2006) The effect of thickness on ZnO thin film CO gas sensor. The Proceedings of Regional Annual Fundamental Science Seminar (RAFSS) 2006 . pp. 89-94.

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Rf magnetron sputtering system were using to deposited ZnO thin films onto corning substrates as a CO gas sensor. The sensing properties of the thin film thickness on CO gas was investigated. The film thickness was varied by controlling the deposition time.The CO gas sensing properties were determined by in situ measurement for surface resistance of the thin film as a function of film thickness, operating temperature and various CO concentrations. The gas sensitivity of ZnO gas sensor depends upon its grain size.

Item Type:Article
Subjects:Q Science > QC Physics
ID Code:6828
Deposited By: Assoc Prof Dr Zulkafli Othaman
Deposited On:12 Nov 2008 03:07
Last Modified:22 Oct 2017 06:11

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