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Optical properties of silicon nanostructured thin films

Yeong, Wai Woon and Wahab, Yussof and Deraman, Karim and Magentharau, A. (2007) Optical properties of silicon nanostructured thin films. Solid State Science and Technology, 15 (2). pp. 112-117. ISSN 0128-7389

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Official URL: http://www.mass-malaysia.net/journal/jsystem/index...

Abstract

Optical properties of Silicon (Si) nanostructures were investigated. Amorphous Si-rich silicon oxide (Si-rich SiOx) films were grown on intrinsic Si wafer and quartz substrates by using the reactive Radio Frequency (RF) magnetron sputtering technique. Oxygen and argon gas were fed into the vacuum chamber during the deposition to form a mixture of oxygen and argon plasma. High temperature post annealing produced the Si nanocrystals embedded in Si oxide. Photoluminescence (PL) spectra of samples before and after post-annealing in air were compared. The PL intensity increased after annealing. Strong ultraviolet (UV) and blue emission have been observed from the annealed sample. The blue emission was related to the neutral oxygen vacancies from the SiOx films, and the UV emission was ascribed to luminescence centers at the interface between the Si nanocrystals and the SiO2 matrix. Raman scattering was employed to monitor the chemical changes before and after high-temperature annealing.

Item Type:Article
Uncontrolled Keywords:Si nanocrystals, optical properties, Silicon (Si) nanostructures
Subjects:T Technology > T Technology (General)
Q Science > QC Physics
Divisions:Science
ID Code:6748
Deposited By: Associate Professor Dr Karim Deraman
Deposited On:04 Nov 2008 03:24
Last Modified:04 Nov 2008 03:39

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