Universiti Teknologi Malaysia Institutional Repository

Surface characterization of a Au/CNT composite for a MEMS switching application

Hong, Liu and Mcbride, J. W. and Mohd. Yusop, Mohd. Zamri (2016) Surface characterization of a Au/CNT composite for a MEMS switching application. In: 16th International Conference on Nanotechnology - IEEE NANO 2016, 2016, Japan.

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Official URL: http://dx.doi.org/10.1109/NANO.2016.7751537

Abstract

Multi-walled carbon nanotubes (MWCNTs) have been used to improve the lifetime of electrical contacts of MEMS switches. The surface, usually gold-coated, demonstrates a complex structure. Due to the space between vertically aligned nanotubes, the sputtered gold penetrates into CNT. The surface of the composite also presents a much higher roughness than metal-coated surfaces. This work investigates the surface features of the gold-coated MWCNT composite, as well as the gold penetration into MWCNT. Different techniques are used in the study, namely TEM, SEM, AFM and optical surface profiler.

Item Type:Conference or Workshop Item (Paper)
Additional Information:RADIS System Ref No:PB/2017/10833
Uncontrolled Keywords:rough surfaces, surface roughness
Subjects:T Technology > TJ Mechanical engineering and machinery
Divisions:Mechanical Engineering
ID Code:66680
Deposited By: Fazli Masari
Deposited On:22 Nov 2017 00:45
Last Modified:22 Nov 2017 00:45

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