Universiti Teknologi Malaysia Institutional Repository

Wireless displacement sensing of micromachined spiral-coil actuator using resonant frequency tracking

Mohamed Ali, Mohamed Sultan and Abuzaiter, Alaa and Schlosser, Colin and Bycraft, Brad and Takahata, Kenichi (2014) Wireless displacement sensing of micromachined spiral-coil actuator using resonant frequency tracking. Sensors, 14 (7). pp. 12399-12409. ISSN 1424-8220

Full text not available from this repository.

Official URL: http://dx.doi.org/10.3390/s140712399

Abstract

This paper reports a method that enables real-time displacement monitoring and control of micromachined resonant-type actuators using wireless radiofrequency (RF. The method is applied to an out-of-plane, spiral-coil microactuator based on shape-memory-alloy (SMA. The SMA spiral coil forms an inductor-capacitor resonant circuit that is excited using external RF magnetic fields to thermally actuate the coil. The actuation causes a shift in the circuit's resonance as the coil is displaced vertically, which is wirelessly monitored through an external antenna to track the displacements. Controlled actuation and displacement monitoring using the developed method is demonstrated with the microfabricated device. The device exhibits a frequency sensitivity to displacement of 10 kHz/μm or more for a full out-of-plane travel range of 466 μm and an average actuation velocity of up to 155 μm/s. The method described permits the actuator to have a self-sensing function that is passively operated, thereby eliminating the need for separate sensors and batteries on the device, thus realizing precise control while attaining a high level of miniaturization in the device.

Item Type:Article
Uncontrolled Keywords:microactuators, resonant circuit
Subjects:T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions:Electrical Engineering
ID Code:63246
Deposited By: Siti Nor Hashidah Zakaria
Deposited On:19 Jun 2017 03:51
Last Modified:19 Jun 2017 03:51

Repository Staff Only: item control page