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Fabrication of polymeric optical waveguides by B-Staged Bisbenzocyclobutene(BCB)

Shee, Yu Gang and Mohd. Kassim, Norazan and Mohammad, Abu Bakar and Ibrahim, Mohd. Haniff (2004) Fabrication of polymeric optical waveguides by B-Staged Bisbenzocyclobutene(BCB). In: Proceedings 2004 IEEE International Conference on Semiconductor Electronics. IEEE, USA, pp. 522-526. ISBN 0-7803-8658-2

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Abstract

This paper reports the fabrication of polymeric optical waveguides. Single mode planar slab waveguides and straight waveguides had been fabricated from the organic polymer B-staged bisbenzoeyclobutene (BCB) from DOWO Chemical. A low cost fabrication method, chemical etching is used to form the waveguides on BK7 glass substrates. The processing conditions required for the fabrication of single mode optical waveguides are presented.

Item Type:Book Section
Additional Information:ISBN: 0-7803-8658-2 ; IEEE International Conference on Semiconductor Electronics 2004. (ICSE 2004) )
Uncontrolled Keywords:B-staged bisbenzocyclobutene, BCB, polymeric optical waveguides
Subjects:T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions:Electrical Engineering
ID Code:6214
Deposited By: Mohd Haniff Ibrahim
Deposited On:28 Aug 2008 02:03
Last Modified:15 Mar 2011 05:03

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