Shee, Yu Gang and Mohd. Kassim, Norazan and Mohammad, Abu Bakar and Ibrahim, Mohd. Haniff (2004) Fabrication of polymeric optical waveguides by B-Staged Bisbenzocyclobutene(BCB). In: Proceedings 2004 IEEE International Conference on Semiconductor Electronics. IEEE, USA, pp. 522-526. ISBN 0-7803-8658-2
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Abstract
This paper reports the fabrication of polymeric optical waveguides. Single mode planar slab waveguides and straight waveguides had been fabricated from the organic polymer B-staged bisbenzoeyclobutene (BCB) from DOWO Chemical. A low cost fabrication method, chemical etching is used to form the waveguides on BK7 glass substrates. The processing conditions required for the fabrication of single mode optical waveguides are presented.
| Item Type: | Book Section |
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| Additional Information: | ISBN: 0-7803-8658-2 ; IEEE International Conference on Semiconductor Electronics 2004. (ICSE 2004) ) |
| Uncontrolled Keywords: | B-staged bisbenzocyclobutene, BCB, polymeric optical waveguides |
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering |
| Divisions: | Electrical Engineering |
| ID Code: | 6214 |
| Deposited By: | Mohd Haniff Ibrahim |
| Deposited On: | 28 Aug 2008 02:03 |
| Last Modified: | 15 Mar 2011 05:03 |
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