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Fabrication of conical micropore structure on silicon nitride/silicon using focused ion beam milling for biosensor application

Zainal Ariffin, Nur Hamizah and Yahaya, Hafizal and Shinano, Shunji and Tanaka, Satoru and Hashim, Abdul Manaf (2015) Fabrication of conical micropore structure on silicon nitride/silicon using focused ion beam milling for biosensor application. Microelectronic Engineering, 133 . pp. 1-5. ISSN 0167-9317

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Official URL: http://dx.doi.org/10.1016/j.mee.2014.11.011

Abstract

We report the fabrication of conical shape micropore structures on silicon nitride/silicon (Si3N4/Si) substrate to function as a fluidic channel as well as a supporting structure for sensing membrane. Excellent shape of conical structure with large diameter of top hole size and small diameter of bottom hole size (1-2 µm) was successfully fabricated by utilizing a combination of grinding process, fine polishing and multistep focused ion beam (FIB) milling. A so-called re-deposition phenomena seems to be unavoidable in the multistep FIB milling resulted to the formation of tip-like structure at every milling step. Low surface roughness is effective in improving the shape of circumference of the milling area. The possibility to integrate such conical shape structure with graphene was also demonstrated. This result opens up the breakthrough towards new generation of analytical platform for biosensor application.

Item Type:Article
Uncontrolled Keywords:fluidic channel, focused ion beam, silicon
Subjects:T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions:Malaysia-Japan International Institute of Technology
ID Code:55227
Deposited By: Fazli Masari
Deposited On:22 Aug 2016 08:04
Last Modified:15 Feb 2017 07:21

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