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High-aspect-ratio, free-form patterning of carbon nanotube forests using micro-electro-discharge machining

Mohamed Ali, Mohamed Sultan and Khalid, Waqas and Dahmardeh, Masoud and Choi, Yongho and Yaghoobi , Parham and Nojeh, Alireza and Takahata, Kenichi (2010) High-aspect-ratio, free-form patterning of carbon nanotube forests using micro-electro-discharge machining. Diamond and Related Materials, 19 (11). pp. 1405-1410. ISSN 0925-9635

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Official URL: http://dx.doi.org/10.1016/j.diamond.2010.08.007

Abstract

This paper reports post-growth processing of vertically aligned carbon nanotube forests for the formation of high-aspect-ratio, three-dimensional microstructures in the material. High-frequency pulses of electrical discharge are generated to locally machine the nanotubes in order to create target shapes in a forest. Machining is performed in both dielectric oil and air. The optimal processing is demonstrated in air with a pulse voltage and peak current of 30 V and 60 mA, respectively, providing a discharge gap of ~ 10 µm. The minimized discharge energy and gap are shown to achieve an aspect ratio of 20 with the smallest feature of 5 µm in forests. Multilayer, three-dimensional geometries with vertical and angled surfaces are successfully obtained without disordering the vertical orientation of the nanotubes. Scanning electron microscopy and energy-dispersive X-ray spectroscopy are used for the surface analysis of the micromachined forests, revealing the dependence of their surface characteristics on the discharge conditions.

Item Type:Article
Uncontrolled Keywords:carbon nanotube forests, high-aspect-ratio microstructures, free-form micromachining, micro-electro-discharge machining, chemical vapor deposition, micro-electro-mechanical systems
Subjects:T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions:Electrical Engineering
ID Code:26159
Deposited By: Liza Porijo
Deposited On:28 Jun 2012 00:32
Last Modified:06 Jul 2012 03:38

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