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Surface roughness and morphology analysis using an Atomic Force Microscopy of polycrystalline diamond coated Si3N4 deposited by microwave plasma assisted chemical vapor deposition

Hamzah, Esah and Purniawan, A. and Toff, M. R. M. (2007) Surface roughness and morphology analysis using an Atomic Force Microscopy of polycrystalline diamond coated Si3N4 deposited by microwave plasma assisted chemical vapor deposition. In: International Conference on Materials for Advanced Technologies (ICMAT2007), 2007, Singapore.

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Item Type:Conference or Workshop Item (Paper)
Subjects:T Technology > TJ Mechanical engineering and machinery
Divisions:Mechanical Engineering
ID Code:24456
Deposited By: Ramli Haron
Deposited On:18 Apr 2012 05:37
Last Modified:18 Apr 2012 05:59

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