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Investigation on the effects of halo implants for nanoscale vertical MOSFET

Ismail, Razali and Saad, Ismail and Arora, Vijay (2007) Investigation on the effects of halo implants for nanoscale vertical MOSFET. In: The 23rd Regional Conferences Solid State Science and Technology 2007 (RCSSST 2007), 2007, Johor Bahru.

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Abstract

To provide a platform for discussions of Solid State Science and Technology in all aspects of physical properties, chemistry, characterizations, preparation methods, optical properties, macro-,micro- and nano-structures. Besides that, modeling, simulation, measurement techniques as well as current development in technology will also be discussed.

Item Type:Conference or Workshop Item (Paper)
Subjects:T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions:Electrical Engineering
ID Code:24428
Deposited By:INVALID USER
Deposited On:18 Apr 2012 05:41
Last Modified:03 Aug 2017 00:04

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