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Application of tuneable IR Laser & FTIR spectroscopy to thermal & plasma-enhanced chemical vapour deposition

Raja Ibrahim, Raja Kamarulzaman and Kasyutich, Vasili L. and Martin, Philip A. (2010) Application of tuneable IR Laser & FTIR spectroscopy to thermal & plasma-enhanced chemical vapour deposition. In: Infrared Plasma Spectroscopy 2010 , 25-27 August 2010 , n/a.

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Item Type:Conference or Workshop Item (Paper)
Subjects:Q Science
Divisions:Science
ID Code:23824
Deposited By: Liza Porijo
Deposited On:13 Jun 2012 06:18
Last Modified:13 Jun 2012 06:18

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