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Infrared analysis of a-C:H thin films grown by DC-PECVD at various chamber pressures

Sakrani, Samsudi (2003) Infrared analysis of a-C:H thin films grown by DC-PECVD at various chamber pressures. In: The XX Regional Conf. On Solid State Science and Technology, 2003, Swiss-Garden Resort, Damai Laut, Lumut, Perak.

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Item Type:Conference or Workshop Item (Paper)
Subjects:Q Science
Divisions:Science
ID Code:22538
Deposited By: Liza Porijo
Last Modified:16 Feb 2012 04:38

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