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Infrared and raman studies of radio frequency sputtered hydrogen amorphous silicon carbide thin films

A. Hasbi, Hasbullah and Othman, Zul and Sakrani, Samsudi (2003) Infrared and raman studies of radio frequency sputtered hydrogen amorphous silicon carbide thin films. In: International Conference on Advancement in Science and Technology , 2003, Kuala Lumpur.

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Item Type:Conference or Workshop Item (Paper)
Uncontrolled Keywords:infrared, raman studies, amorphous silicon
Subjects:Unspecified
Divisions:Others
ID Code:22151
Deposited By: Liza Porijo
Deposited On:03 Sep 2014 07:14
Last Modified:03 Sep 2014 07:14

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