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Infrared and raman studies of radio frequency sputtered hydrogen amorphous silicon carbide thin films

A. Hasbi, Hasbullah (2003) Infrared and raman studies of radio frequency sputtered hydrogen amorphous silicon carbide thin films. In: International Conference on Advancement in Science and Technology , 2003, Kuala Lumpur.

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Item Type:Conference or Workshop Item (Paper)
Subjects:Unspecified
Divisions:Others
ID Code:22151
Deposited By: Liza Porijo
Last Modified:08 Feb 2012 04:29

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