Sumpono, Imam (2005) The modeling of transport phenomena in the VHF-PECVD reactor. In: Annual Fundamental Science Seminar 2005 (AFSS2005),Johor, 2005, Johor.
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| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Subjects: | Q Science |
| Divisions: | Science |
| ID Code: | 21753 |
| Deposited By: | Liza Porijo |
| Last Modified: | 20 Jan 2012 04:03 |
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