Universiti Teknologi Malaysia Institutional Repository

The modeling of transport phenomena in the VHF-PECVD reactor

Sumpono, Imam (2005) The modeling of transport phenomena in the VHF-PECVD reactor. In: Annual Fundamental Science Seminar 2005 (AFSS2005),Johor, 2005, Johor.

Full text not available from this repository.


Item Type:Conference or Workshop Item (Paper)
Subjects:Q Science
Divisions:Science
ID Code:21753
Deposited By: Liza Porijo
Last Modified:20 Jan 2012 04:03

Repository Staff Only: item control page