Cheah, Wei Leow and Mohammad, A .B. (2004) MEMS On/off and x2 Optical Switch with Integrated Fiber Alignment Capability. In: Semiconductor Electronics, 2004. ICSE 2004. IEEE International Conference on, 7-9 December 2004, Kuala Lumpur.
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Abstract
An on/off free space optical switch is described in this paper. The device consists of intersecting cantilevers and is electrostatically actuated. A fiber is put onto the cantilevers and by controlling the position of the flber through actuation, switching operation can be achieved. The device is also suitable for inpackage fiber alignment application, where the cantilevers can be used as passive or active fiber alignment microstructure.
| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering |
| Divisions: | Electrical Engineering |
| ID Code: | 2036 |
| Deposited By: | Dr Zaharuddin Mohamed |
| Deposited On: | 21 Mar 2007 08:56 |
| Last Modified: | 30 Aug 2017 07:03 |
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