Saad, Ismail and A. Riyadi, Munawar and Ismail, Razali and K. Arora, Vijay (2008) Self-aligned double-gate (DG) vertical MOSFET’s using oblique rotating implantation (ORI) method with reduced parasitic capacitance. In: IEEE International Conference on Semiconductor Electronics (ICSE 2008), 2008, Johor Bahru, Johor.
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| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering |
| Divisions: | Electrical Engineering |
| ID Code: | 19009 |
| Deposited By: | Liza Porijo |
| Deposited On: | 29 Nov 2011 08:55 |
| Last Modified: | 29 Nov 2011 08:55 |
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