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Carbonization layer obtained by acetylene reaction with silicon (100) and (111) surface using low pressure chemical vapor deposition

Hashim, Abdul Manaf (2008) Carbonization layer obtained by acetylene reaction with silicon (100) and (111) surface using low pressure chemical vapor deposition. Journal of Applied Sciences, 8 (19). 3473 - 3478. ISSN 1812-5654

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Item Type:Article
Subjects:Unspecified
Divisions:Electrical Engineering
ID Code:18822
Deposited By: Kamariah Mohamed Jong
Last Modified:23 Nov 2011 02:57

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