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Numerical simulation of two-dimensional thermal oxidation of silicon

Emadi, Mehran and Ahmadi, Mohammad Taghi and Ismail, Razali (2008) Numerical simulation of two-dimensional thermal oxidation of silicon. In: Seminar Kebangsaan Pendidikan Sains dan Matematik, 2008, UTM.

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Item Type:Conference or Workshop Item (Paper)
Subjects:T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions:Electrical Engineering
ID Code:16881
Deposited By: Liza Porijo
Deposited On:31 Oct 2011 08:56
Last Modified:31 Oct 2011 08:56

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