A. Riyadi, Munawar and Saad, Ismail and Ahmadi Razali Ismail, Mohammad Taghi (2008) Analysis of pillar thickness variation on source-on-top (SOT) nanoscale vertical MOSFET with oblique rotating implantation (ORI) method. In: MASS Regional Conference on Solid State Science and Technology (RCSSST 2008), 2008, Port Dickson.
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| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering |
| Divisions: | Electrical Engineering |
| ID Code: | 16873 |
| Deposited By: | Liza Porijo |
| Deposited On: | 31 Oct 2011 07:34 |
| Last Modified: | 31 Oct 2011 07:34 |
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