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Nanoscaling analysis of multiple gate vertical MOSFET with the oblique rotating implantation (ORI) method

Saad, Ismail and Mohd. Ali Lee, Razak and Napiah, Zul Atfyi F. M. and Riyadi, Munawar and Ismail, Razali and Arora, Vijay K. (2009) Nanoscaling analysis of multiple gate vertical MOSFET with the oblique rotating implantation (ORI) method. In: Proceeding of 2009 Regional Symposium on Microelectronics, (RSM 2009) , 2009, Kota Bharu, Kelantan.

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Item Type:Conference or Workshop Item (Paper)
Subjects:T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions:Electrical Engineering
ID Code:15481
Deposited By: Liza Porijo
Deposited On:30 Sep 2011 09:51
Last Modified:30 Sep 2011 09:51

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