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Formation of self-assembled Ge islands on Si (100) using magnetron sputtering and subsequent rapid thermal annealing

Ameruddin, Amira Saryati and Othaman, Zulkafli and Aryanto, Didik and Ismail, Abd. Khamim (2009) Formation of self-assembled Ge islands on Si (100) using magnetron sputtering and subsequent rapid thermal annealing. In: The 3rd Asian Physics Symposium (APS 2009), 2009, Institut Teknologi Bandung, Indonesia.

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Item Type:Conference or Workshop Item (Paper)
Subjects:Q Science > Q Science (General)
Divisions:Science
ID Code:15208
Deposited By: Liza Porijo
Deposited On:22 Sep 2011 09:52
Last Modified:22 Sep 2011 09:52

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