Universiti Teknologi Malaysia Institutional Repository

Enhanced performance of nanoscale vertical MOSFET by oblique rotating implantation (ORI) and fillet local oxidation (FILOX + ORI) technology

Saad, Ismail and M. A. Lee, Razak and A. R., Munawar and F. M. N., Zul Atfyi and Ismail, Razali (2009) Enhanced performance of nanoscale vertical MOSFET by oblique rotating implantation (ORI) and fillet local oxidation (FILOX + ORI) technology. In: Second Seminar on Engineering and Information Technology 2009, 2009, Kota Kinabalu.

Full text not available from this repository.


Item Type:Conference or Workshop Item (Paper)
Subjects:T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions:Electrical Engineering
ID Code:15151
Deposited By: Liza Porijo
Deposited On:21 Sep 2011 09:47
Last Modified:21 Sep 2011 09:47

Repository Staff Only: item control page