Saad, Ismail and M. A. Lee, Razak and A. R., Munawar and F. M. N., Zul Atfyi and Ismail, Razali (2009) Enhanced performance of nanoscale vertical MOSFET by oblique rotating implantation (ORI) and fillet local oxidation (FILOX + ORI) technology. In: Second Seminar on Engineering and Information Technology 2009, 2009, Kota Kinabalu.
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| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering |
| Divisions: | Electrical Engineering |
| ID Code: | 15151 |
| Deposited By: | Liza Porijo |
| Deposited On: | 21 Sep 2011 09:47 |
| Last Modified: | 21 Sep 2011 09:47 |
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