Hamidinezhad, Habib and Wahab, Yussof and Othaman, Zulkafli and Sumpono, Imam (2009) Effect of plasma power and flow rate of silane gas on diameter of silicon nanowires by plasma enhanced chemical vapor deposition. In: Persidangan Fizik Kebangsaan, 2009, Melaka.
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| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Subjects: | Q Science > Q Science (General) |
| Divisions: | Science |
| ID Code: | 15118 |
| Deposited By: | Liza Porijo |
| Deposited On: | 21 Sep 2011 09:56 |
| Last Modified: | 22 Sep 2011 10:00 |
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