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Effect of plasma power and flow rate of silane gas on diameter of silicon nanowires by plasma enhanced chemical vapor deposition

Hamidinezhad, Habib and Wahab, Yussof and Othaman, Zulkafli and Sumpono, Imam (2009) Effect of plasma power and flow rate of silane gas on diameter of silicon nanowires by plasma enhanced chemical vapor deposition. In: Persidangan Fizik Kebangsaan, 2009, Melaka.

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Item Type:Conference or Workshop Item (Paper)
Subjects:Q Science > Q Science (General)
Divisions:Science
ID Code:15118
Deposited By: Liza Porijo
Deposited On:21 Sep 2011 09:56
Last Modified:22 Sep 2011 10:00

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