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Design of nanoscale vertical double gate PMOS with oblique rotating implantation method

A. Riyadi, Munawar and E. Suseno, Jatmiko and Saad, Ismail and Ismail, Razali and K. Arora, Vijay (2009) Design of nanoscale vertical double gate PMOS with oblique rotating implantation method. In: Proceeding of 2009 Regional Symposium on Microelectronics, (RSM 2009) , 2009, Kota Bharu, Kelantan.

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Item Type:Conference or Workshop Item (Paper)
Subjects:T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions:Electrical Engineering
ID Code:15042
Deposited By: Liza Porijo
Deposited On:20 Sep 2011 09:08
Last Modified:20 Sep 2011 09:08

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