Saad, Ismail and Ismail, Razali and Arora, Vijay (2007) Investigation on the effects of oblique rotating ion implantation (ORI) for nanoscale vertical double gate NMOSFET. In: 23rd Regional Conferences Solid State Science and Technology 2007 (RCSSST 2007), 2007, Johor Bahru.
Full text not available from this repository.
| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Uncontrolled Keywords: | oblique rotating ion implantation (ORI), nanoscale vertical |
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering |
| Divisions: | Electrical Engineering |
| ID Code: | 14144 |
| Deposited By: | Liza Porijo |
| Deposited On: | 18 Aug 2011 09:31 |
| Last Modified: | 27 Nov 2012 01:06 |
Repository Staff Only: item control page
