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Bonding properties of hydrogenated amorphous carbon thin films characterized by fourier transform infra-red spectrometer

Suraini, A. B. and Rosazle, R. and Sakrani, S. and Rusop, M. (2009) Bonding properties of hydrogenated amorphous carbon thin films characterized by fourier transform infra-red spectrometer. In: Nanoscience and Nanotechnology. AIP Conference Proceedings , 1136 . Amer Inst Physics, New York, pp. 437-442. ISBN 978-0-7354-0673-5

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Official URL: http://dx.doi.org/10.1063/1.3160180

Abstract

This paper reports a study of structural properties of hydrogenated amorphous carbon (a-C:H) thin films using infrared (IR) absorption. The samples were prepared on corning glass substrate using a direct-current plasma enhanced chemical vapor deposition (DC-PECVD) technique. The deposition time was fixed at 5 hours. The infrared absorption was taken in the stretching frequency ranges from 2700-3200cm(-1) to identify the relevant CH bonding. The measured spectrums were observed to be in wavy-like curves associated with sp(m) CH(n) configuration with m, n =1-3. The spectrum showed gradually disappearing with increasing power, w (0.2989-0.4218 W) as the film properties ranges from polymer-like (PAC) to graphite-like (GAC). The curve measured at 0.2989 W indicated marked changes with detectable infrared absorption rates in a-C:H at 2959cm(-1), 2934cm(-1) and 2872cm(-1) (polymer-like structures, PAC). These correspond to the presence of sp(3) CH(3) (symmetric and asymmetric), sp(3) CH(2) (asymmetric) and sp(3) CH.

Item Type:Book Section
Additional Information:International Conference on Nanoscience and Nanotechnology (NANO-SciTech 2008) Location: Selangor, MALAYSIA Date: NOV 18-21, 2008 ISSN : 0094-243X
Uncontrolled Keywords:bonding, FTIR, infrared absorption, diamond-like carbon, a-C:H, PECVD
Subjects:Q Science > QC Physics
Divisions:Science
ID Code:13241
Deposited By: Ms Zalinda Shuratman
Deposited On:27 Jul 2011 01:21
Last Modified:27 Jul 2011 01:21

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