Ibrahim, M. H. and Mohd Kassim, N. and Mohammad, A. B. and Supa’at, A. S. M. and Chin, Mee-Koy and Lee, Shuh-Ying (2010) Optical cross couplers based on wet-etch processing of benzocyclobutene polymer. Optical Materials, 32 (6). pp. 703-706. ISSN 09253467
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Official URL: http://dx.doi.org/10.1016/j.optmat.2009.04.015
n this paper, a characterization process of benzocyclobutene (BCB 4024-40) polymer and its realization into optical devices are described. By using the prism coupling technique, the polymer film thickness for various coating speed and the refractive index have been measured. Based on these results, the optical waveguides and couplers have been fabricated using the wet-chemical etch processing technique to take advantage of the photosensitive nature of the polymer. By adopting the multimode interference technique (MMI), the fabricated 2 × 2 optical cross couplers have been testified to demonstrate a maximum crosstalk of -17.81 dB and maximum loss of 3.37 dB.
|Uncontrolled Keywords:||benzocyclobutene polymer, chemical etching technique, multimode interference, optical coupler, photolithography|
|Subjects:||T Technology > TK Electrical engineering. Electronics Nuclear engineering|
|Deposited By:||S.N.Shahira Dahari|
|Deposited On:||25 Jul 2011 07:09|
|Last Modified:||25 Jul 2011 07:09|
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