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Raman and UV-visible spectrophotometer studies of hydrogenated amorphous carbon thin films

A. B., Suriani and R., Rosazley and Sakrani, Samsudi and M. Rusop, Mohamad (2009) Raman and UV-visible spectrophotometer studies of hydrogenated amorphous carbon thin films. In: AIP Conference Proceedings. American Institute of Physics, USA, 443 -448. ISBN 978-073540673-5

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Official URL: http://dx.doi.org/10.1063/1.3160181

Abstract

Hydrogenated amorphous carbon (a-C:H) thin films were prepared using a direct-current plasma enhanced chemical vapor deposition (DC-PECVD) over a various range of DC power (w) in range of 0.2989-0.4218 W. Changes in the film properties due to DC-power were systematically studied by Raman spectrometer and UV-Vis spectrophotometer. Based on the results, the films studied in the present research are found to consist of sp2 clusters of which their size increases with increasing power during the deposition, resulting in lower hydrogen, sp3 content and optical band gap. The experimental results revealed that a-C:H properties are highly dependent on DC-power.

Item Type:Book Section
Additional Information:International Conference on Nanoscience and Nanotechnology, Nano-SciTech 2008; Selangor; 18 November 2008 through 21 November 2008
Uncontrolled Keywords:A-c:h, diamond-like carbon, optical band gap, pecvd, raman
Subjects:Q Science > QC Physics
Divisions:Science
ID Code:13083
Deposited By: Mrs Liza Porijo
Deposited On:18 Jul 2011 01:39
Last Modified:18 Jul 2011 01:39

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