Ahmad Asri, Muhammad Izzudin and Hasan, Mohammed Nazibul and Md. Yunos, Yusri and Mohamed Ali, Mohamed Sultan (2022) Design and analysis of silicon nanowire array based on SAW gas sensor. In: 3rd International Conference on Control, Instrumentation and Mechatronics Engineering, CIM 2022, 2 March 2022 - 3 March 2022, Virtual, Online.
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Official URL: http://dx.doi.org/10.1007/978-981-19-3923-5_53
Abstract
Estimating the sensitivity of a surface acoustic wave (SAW) gas sensor accurately and effectively is essential for gas sensing applications. In this paper, the sensitivity of a SAW gas sensor without sensitive material, as well as with a sensing layer comprised of silicon and silicon nanowire arrays (SiNWA), are studied and analyzed via finite element method. Correspondingly, the effect of the length of the sensing material and the gas concentration on the SAW gas sensor sensitivity is being investigated. The proposed SiNWA-based SAW sensor showed high sensitivity at a length of 700 nm, owing to the high surface-to-volume ratio of sensing layer material. Meanwhile, it demonstrated a frequency shift of 270.3 kHz when exposed to a 5000-ppm carbon dioxide gas concentration through the sensing layer. Overall, the SAW gas sensor with SiNWA sensing layer provided significant sensing response.
| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Uncontrolled Keywords: | finite element analysis, gas concentration, saw gas sensor, silicon nanowire array |
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering |
| Divisions: | Faculty of Engineering - School of Electrical |
| ID Code: | 100725 |
| Deposited By: | Yanti Mohd Shah |
| Deposited On: | 30 Apr 2023 10:19 |
| Last Modified: | 30 Apr 2023 10:19 |
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